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Title: Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
Authors: Subramanian Harhara Subramanian.
Keywords: DRNTU::Engineering::Manufacturing::Production management
Issue Date: 2003
Abstract: Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of lots together as a batch.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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