Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6435
Title: Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
Authors: Tan, Chee Khiang.
Keywords: DRNTU::Engineering::Manufacturing::Product engineering
Issue Date: 2003
Abstract: This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is based on a hybrid configuration, with a laser diode, a photodetector and a MEMS mirror, that need to be integrated in the same package. This research effort was focused on the development of such a package.
URI: http://hdl.handle.net/10356/6435
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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