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|Title:||Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror||Authors:||Tan, Chee Khiang.||Keywords:||DRNTU::Engineering::Manufacturing::Product engineering||Issue Date:||2003||Abstract:||This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is based on a hybrid configuration, with a laser diode, a photodetector and a MEMS mirror, that need to be integrated in the same package. This research effort was focused on the development of such a package.||URI:||http://hdl.handle.net/10356/6435||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
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