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Title: Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering
Authors: Tan, Jen Ngee.
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2002
Abstract: Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for example, wear, high stresses, elevated temperatures, and corrosive environments.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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