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Title: NiTi shape memory alloy thin film based microgripper
Authors: Tan, Jun Ping.
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2001
Abstract: The objectives of this project are to produce NiTi thin film that exhibits Shape Memory Effect (SME) onto a cantilever beam and to produce a microgripper of size about 750x350x350 micrometer using the cantilever structure.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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