Closed-loop job release based on WIPLOAD control in semiconductor wafer fabrication
Date of Issue2006
School of Mechanical and Aerospace Engineering
This thesis presents a new methodology for making job release decisions in a semi-conductor wafer fabrication line. Although the new job release approach is more broadly applicable to other manufacturing systems which have similar characteristics, the application to semiconductor manufacturing is quite relevant and of great interest, given the complxity and cost of modern wafer fabrications.
Nanyang Technological University