Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/6931| Title: | UV laser micro-machining of MEMS | Authors: | Yang, Lin Jiang Gong, Thomas Haiqing |
Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2002 | Abstract: | In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin. | URI: | http://hdl.handle.net/10356/6931 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Research Reports (Staff & Graduate Students) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| MPE-RESEARCH-REPORT_37.pdf Restricted Access | 4.14 MB | Adobe PDF | View/Open |
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