Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6931
Title: UV laser micro-machining of MEMS
Authors: Yang, Lin Jiang
Gong, Thomas Haiqing
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2002
Abstract: In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.
URI: http://hdl.handle.net/10356/6931
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Research Reports (Staff & Graduate Students)

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