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Title: Study on ultra-precision compliant mechanisms for nanotechnology applications
Authors: Du, Hejun
Lim, Mong King
Ling, Shih Fu
Lau, Michael Wai Shing
Tai, Kang
Keywords: DRNTU::Engineering::Nanotechnology
Issue Date: 2003
Abstract: Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical systems (MEMS) and robots, where micron or even nanometric resolution and accuracy are required for the motion. On the contrary to rigid-body mechanisms, compliant mechanisms consist of monolithic construction without rigid joints or sliders. Thus, they effectively eliminate the wear, backlash, lubrication, and friction problems, which are often encountered by rigid-body mechanisms. Furthermore, their monolithic construction makes the costly assembly process unnecessary and the integration of smart sensors and actuators possible.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Research Reports (Staff & Graduate Students)

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