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|Title:||Study on ultra-precision compliant mechanisms for nanotechnology applications||Authors:||Du, Hejun
Lim, Mong King
Ling, Shih Fu
Lau, Michael Wai Shing
|Keywords:||DRNTU::Engineering::Nanotechnology||Issue Date:||2003||Abstract:||Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical systems (MEMS) and robots, where micron or even nanometric resolution and accuracy are required for the motion. On the contrary to rigid-body mechanisms, compliant mechanisms consist of monolithic construction without rigid joints or sliders. Thus, they effectively eliminate the wear, backlash, lubrication, and friction problems, which are often encountered by rigid-body mechanisms.||URI:||http://hdl.handle.net/10356/6943||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Research Reports (Staff & Graduate Students)|
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