Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6943
Title: Study on ultra-precision compliant mechanisms for nanotechnology applications
Authors: Du, Hejun
Lim, Mong King
Ling, Shih Fu
Lau, Michael Wai Shing
Tai, Kang
Keywords: DRNTU::Engineering::Nanotechnology
Issue Date: 2003
Abstract: Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical systems (MEMS) and robots, where micron or even nanometric resolution and accuracy are required for the motion. On the contrary to rigid-body mechanisms, compliant mechanisms consist of monolithic construction without rigid joints or sliders. Thus, they effectively eliminate the wear, backlash, lubrication, and friction problems, which are often encountered by rigid-body mechanisms.
URI: http://hdl.handle.net/10356/6943
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Research Reports (Staff & Graduate Students)

Files in This Item:
File Description SizeFormat 
MPE-RESEARCH-REPORT_48.pdf
  Restricted Access
20.48 MBAdobe PDFView/Open

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.