Micro-systems mechanics VOLUME I

Abstract

Including: 3 parts. System integration and miniaturization have become one of the most distinct trends of modern technological development where electro-mechanical devices are highly miniaturized and integrated into micro-systems to meet various challenging industrial and commercial applications. However, as these micro-systems are increasingly miniaturized to become smaller in size and lighter in weight, new structural mechanics related issues such as structural dynamics, kinematics, tribology, acoustics, mechanical properties of materials, fluid mechanics, thermal- mechanical interactions etc. become ever more acute and need to be carefully considered in micro-system designs, fabrication and assembly to optimize system performances. Most of these mechanics issues will assume different roles in different forms as compared with those involved in conventional system designs and even new mechanics/physics phenomena will emerge as the feature size of a micro-system becomes ever increasingly small. In order to improve design capabilities and hence performance of micro-systems, it is obvious that these various mechanics issues need to be rigorously studied and thoroughly understood to enable accurate modeling, characterization and control methodologies needed to be developed for micro-system applications.