Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6977
Title: Research and development of compliant micro-electro-mechanical systems (MEMS)
Authors: Xiao, Zhongmin
Keywords: DRNTU::Engineering::Mechanical engineering::Mechatronics
Issue Date: 2001
Abstract: This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving voltages.
URI: http://hdl.handle.net/10356/6977
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Research Reports (Staff & Graduate Students)

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