Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/7017
Title: | Development of a linear micro actuator for ultra-precision positioning (Vol.2) | Authors: | Du, Hejun Lim, Mong King Ling, Shih Fu Gong, Thomas Haiqing Lin, Rongming Hung, Nguyen Phu |
Keywords: | DRNTU::Engineering::Manufacturing::Product engineering | Issue Date: | 2002 | Abstract: | There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positioning accuracy leaped quantumly from micron level to sub-micron, and subsequently to nano level. In addition to the ever-rising demand for high resolution, there is also strong demand for relatively large range gross motion so that the current two tiers coarse/fine positioning technology can be replaced by the more efficient single tier ultra-precision positioning actuators. Such high precision actuators of nano-level resolution can be made possible by using smart materials based actuators and microelectromechanical system (MEMS) technology. | URI: | http://hdl.handle.net/10356/7017 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Research Reports (Staff & Graduate Students) |
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File | Description | Size | Format | |
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MAE-RESEARCH-REPORT-2_6.pdf Restricted Access | 57.92 MB | Adobe PDF | View/Open |
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