Please use this identifier to cite or link to this item:
|Title:||Comparative study of current-voltage characteristics of Ni and Ni(Pt)- alloy silicided p+/n diodes||Authors:||Mangelinck, D.
Lahiri, S. K.
Chi, Dong Zhi
Lee, Pooi See
Pey, Kin Leong
|Keywords:||DRNTU::Engineering::Materials::Microelectronics and semiconductor materials||Issue Date:||2001||Source:||Chi, D. Z., Mangelick, D., Lahiri, S. K., Lee, P. S., & Pey, K. L. (2001). Comparative study of current-voltage characteristics of Ni and Ni(Pt)- alloy silicided p+/n diodes. Applied Physics Letters, 78(21), 3256-3258.||Series/Report no.:||Applied physics letters||Abstract:||A comparative study of the I –V characteristics of p+/n diodes silicided with a pure Ni and Ni(Pt) alloy has been performed. Higher saturation currents as well as abnormal reverse I –V characteristics were observed for some of the diodes which were silicided with pure Ni at 700 °C while good I –V characteristics were observed for other diodes. Our results show that the forward current in the diodes with good I –V characteristics is dominated by electron diffusion in the p+ region. For diodes with higher saturation currents, it has been concluded that both forward and reverse currents in these diodes are dominated by the current following through Schottky contacts that are formed due to inadvertent penetration of NiSi spikes through the p1 region into n region. The formation of Schottky contact was not observed in diodes silicided with a Ni(Pt) alloy, providing a clear evidence of enhanced thermal stability of Pt containing NiSi.||URI:||https://hdl.handle.net/10356/79897
|DOI:||10.1063/1.1374496||Rights:||© 2001 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official URL: http://dx.doi.org/10.1063/1.1374496. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.||Fulltext Permission:||open||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MSE Journal Articles|
Files in This Item:
|107. A comparative study of current-voltage characteristics of Ni and Ni(Pt)- alloy silicided.pdf||72.18 kB||Adobe PDF|
checked on Jun 18, 2020
WEB OF SCIENCETM
checked on Oct 20, 2020
Page view(s) 20690
checked on Oct 25, 2020
checked on Oct 25, 2020
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.