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https://hdl.handle.net/10356/84177
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DC Field | Value | Language |
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dc.contributor.author | Lee, Kwang Hong | en |
dc.contributor.author | Bao, Shuyu | en |
dc.contributor.author | Wang, Bing | en |
dc.contributor.author | Wang, Cong | en |
dc.contributor.author | Yoon, Soon Fatt | en |
dc.contributor.author | Michel, Jurgen | en |
dc.contributor.author | Fitzgerald, Eugene A. | en |
dc.contributor.author | Tan, Chuan Seng | en |
dc.date.accessioned | 2016-11-29T08:48:38Z | en |
dc.date.accessioned | 2019-12-06T15:39:55Z | - |
dc.date.available | 2016-11-29T08:48:38Z | en |
dc.date.available | 2019-12-06T15:39:55Z | - |
dc.date.issued | 2016 | en |
dc.identifier.citation | Lee, K. H., Bao, S., Wang, B., Wang, C., Yoon, S. F., Michel, J., et al. (2016). Reduction of threading dislocation density in Ge/Si using a heavily As-doped Ge seed layer. AIP Advances, 6(2), 025028-. | en |
dc.identifier.issn | 2158-3226 | en |
dc.identifier.uri | https://hdl.handle.net/10356/84177 | - |
dc.description.abstract | High quality germanium(Ge)epitaxialfilm is grown directly on silicon (001) substrate with 6° off-cut using a heavily arsenic (As) dopedGe seed layer. The growth steps consists of (i) growth of a heavily As-doped Ge seed layer at low temperature (LT, at 400 °C), (ii) Gegrowth with As gradually reduced to zero at high temperature (HT, at 650 °C), (iii) pure Gegrowth at HT. This is followed by thermal cyclic annealing in hydrogen at temperature ranging from 600 to 850 °C. Analytical characterization have shown that the Geepitaxialfilm with a thickness of ∼1.5 µm experiences thermally induced tensile strain of 0.20% with a treading dislocation density (TDD) of mid 106/cm2 which is one order of magnitude lower than the control group without As doping and surface roughness of 0.37 nm. The reduction in TDD is due to the enhancement in velocity of dislocations in an As-doped Gefilm. | en |
dc.description.sponsorship | NRF (Natl Research Foundation, S’pore) | en |
dc.format.extent | 8 p. | en |
dc.language.iso | en | en |
dc.relation.ispartofseries | AIP Advances | en |
dc.rights | © 2016 The Author(s) (published by American Institute of Physics). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). | en |
dc.subject | Germanium | en |
dc.subject | Elemental semiconductors | en |
dc.title | Reduction of threading dislocation density in Ge/Si using a heavily As-doped Ge seed layer | en |
dc.type | Journal Article | en |
dc.contributor.school | School of Electrical and Electronic Engineering | en |
dc.identifier.doi | 10.1063/1.4943218 | en |
dc.description.version | Published version | en |
item.fulltext | With Fulltext | - |
item.grantfulltext | open | - |
Appears in Collections: | EEE Journal Articles |
Files in This Item:
File | Description | Size | Format | |
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Reduction of threading dislocation density in GeSi using a heavily As-doped Ge seed layer.pdf | 4.62 MB | Adobe PDF | View/Open |
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