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Title: A nano-actuator via cavity-enhanced optical dipole force
Authors: Tao, J. F.
Wu, J.
Cai, H.
Zhang, Q. X.
Kun, X.
Tsai, J. M.
Liu, A. Q.
Kwong, Dim Lee.
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2012
Source: Tao, J. F., Wu, J., Cai, H., Zhang, Q. X., Kun, X., Tsai, J. M., et al. (2012). A nano-actuator via cavity-enhanced optical dipole force . 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
Abstract: In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.
DOI: 10.1109/MEMSYS.2012.6170360
Rights: © 2012 IEEE.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:EEE Conference Papers

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