Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/86067
Title: Pulsed laser deposition of epitaxial MgO buffer layer for proton-conducting ceramic electrolytes
Authors: Li, Yong
Wong, Lai Mun
Xie, Hanlin
Wang, Shijie
Su, Pei-Chen
Keywords: Pulsed Laser Deposition (PLD)
Epitaxial MgO Thin Film
Issue Date: 2016
Source: Li, Y., Wong, L. M., Xie, H., Wang, S., & Su, P.-C. (2017). Pulsed laser deposition of epitaxial MgO buffer layer for proton-conducting ceramic electrolytes. Surface and Coatings Technology, 320, 339-343.
Series/Report no.: Surface and Coatings Technology
Abstract: This work studies the deposition of epitaxial MgO thin films with thickness of 40 nm deposited on bare Si (100) wafer using pulsed laser deposition (PLD), which can serve as a buffer layer for subsequent growth of textured Y-BaZrO3 with high proton-conductivity. The success of epitaxial deposition were achieved by careful preparation of Si substrate by pre-etching with HF solution, as well as by optimizing deposition parameters including oxygen partial pressure and substrate temperatures. Epitaxial (100) MgO film with cubic lattice structure and the lattice constant of 4.21 Å were obtained, which showed highly lattice match with Y-BaZrO3 perovskite of 4.21 Å.
URI: https://hdl.handle.net/10356/86067
http://hdl.handle.net/10220/43928
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2016.12.052
Rights: © 2016 Elsevier B.V.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Journal Articles

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