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Title: Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools
Authors: Yang, Fajun
Wu, Naiqi
Qiao, Yan
Zhou, Mengchu
Su, Rong.
Qu, Ting
Keywords: Scheduling
Petri Net
Issue Date: 2017
Source: Yang, F., Wu, N., Qiao, Y., Zhou, M., Su, R., & Qu, T. (2018). Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools. IEEE Access, 6, 355-365. doi: 10.1109/ACCESS.2017.2763778
Series/Report no.: IEEE Access
Abstract: It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this significant problem, an optimal scheduling strategy is determined first for each individual tool under the condition that the bottleneck individual tool is transport-bound. Then, by developing a Petri net model with robot waiting being explicitly described to reveal the properties of the entire system, this paper shows that to schedule such a tool optimally is to allocate the robot waiting time properly. Then, this paper presents the necessary and sufficient conditions for the existence of an optimal one-wafer cyclic schedule. Thereafter, an efficient algorithm is developed to check the given conditions and find such a schedule efficiently if existing. Finally, two industrial examples are used to verify that the proposed method is applicable and effective.
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2017.2763778
Rights: This journal is 100% open access, which means that all content is freely available without charge to users or their institutions. Articles accepted before 12 June 2019 were published under a CC BY 3.0 or the IEEE Open Access Publishing Agreement license. Questions about copyright policies or reuse rights may be directed to the IEEE Intellectual Property Rights Office at +1-732-562-3966 or
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles

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