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Title: MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications
Authors: Muttikulangara, Sanathanan Swaminathan
Baranski, Maciej
Rehman, Shakil
Hu, Liangxing
Miao, Jianmin
Keywords: Tunable Diffraction Grating
Optical Components
Issue Date: 2017
Source: Muttikulangara, S. S., Baranski, M., Rehman, S., Hu, L., & Miao, J. (2017). MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications. Sensors, 17(10), 2372-.
Series/Report no.: Sensors
Abstract: Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μm at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments.
ISSN: 1424-8220
DOI: 10.3390/s17102372
Rights: © 2017 by The Author(s). Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Journal Articles

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