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https://hdl.handle.net/10356/88584| Title: | EUV generation by plasmonic field enhancement using nanostructures | Authors: | Han, Seunghwoi Kim, Hyunwoong Kim, Young-Jin Kim, Seung-Woo |
Keywords: | EUV Light Source DRNTU::Engineering::Mechanical engineering Plasmonic Field Enhancement |
Issue Date: | 2015 | Source: | Han, S., Kim, H., Kim, Y.-J., & Kim, S.-W. (2015). EUV generation by plasmonic field enhancement using nanostructures. Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015), 9524, 95241S-. doi:10.1117/12.2189570 | Conference: | Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) | Abstract: | Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from moderate femtosecond pulses of ~1 x 1011 W/cm2 intensities without auxiliary power amplification, demonstrating a possibility of achieving robust and reproducible EUV sources of the nano-scale for diverse EUV applications for microscopy, lithography and spectroscopy. | URI: | https://hdl.handle.net/10356/88584 http://hdl.handle.net/10220/46952 |
DOI: | 10.1117/12.2189570 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2189570]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Conference Papers |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EUV generation by plasmonic field enhancement using nanostructures.pdf | 1.58 MB | Adobe PDF |  View/Open |
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