Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/88584
Title: EUV generation by plasmonic field enhancement using nanostructures
Authors: Han, Seunghwoi
Kim, Hyunwoong
Kim, Young-Jin
Kim, Seung-Woo
Keywords: EUV Light Source
DRNTU::Engineering::Mechanical engineering
Plasmonic Field Enhancement
Issue Date: 2015
Source: Han, S., Kim, H., Kim, Y.-J., & Kim, S.-W. (2015). EUV generation by plasmonic field enhancement using nanostructures. Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015), 9524, 95241S-. doi:10.1117/12.2189570
Abstract: Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from moderate femtosecond pulses of ~1 x 1011 W/cm2 intensities without auxiliary power amplification, demonstrating a possibility of achieving robust and reproducible EUV sources of the nano-scale for diverse EUV applications for microscopy, lithography and spectroscopy.
URI: https://hdl.handle.net/10356/88584
http://hdl.handle.net/10220/46952
DOI: 10.1117/12.2189570
Rights: © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2189570]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Conference Papers

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