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Title: | Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength | Authors: | Wen, Yongfu Qu, Weijuan Cheng, Haobo Asundi, Anand |
Keywords: | DRNTU::Engineering::Mechanical engineering Digital Holography Microscopy Dual Wavelength |
Issue Date: | 2015 | Source: | Wen, Y., Qu, W., Cheng, H., & Asundi, A. (2015). Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength. Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015), 9524, 95242M-. doi:10.1117/12.2190197 | Conference: | Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) | Abstract: | An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-splitter to get a higher numerical aperture (NA) of the system. The lateral resolution and the field-of-view of the system are confirmed with a calibration experiment. For the case of the optical path lengths (OPL) of object with step pattern larger than the wavelength, the traditional phase unwrapping algorithms cannot be unequivocally determinate, resulting in a 2π phase ambiguity. To solve this problem, dual wavelength phase unwrapping method was integrated into ICDHM, which extends the measuring capability of ICDHM over several microns of range. The experimental results demonstrate that the developed system is well suitable for the measurement of MEMS and Micro systems samples with high resolution. | URI: | https://hdl.handle.net/10356/89456 http://hdl.handle.net/10220/47091 |
DOI: | 10.1117/12.2190197 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2190197]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Conference Papers |
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Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength.pdf | 1.2 MB | Adobe PDF | View/Open |
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