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Title: | Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter | Authors: | Adhikari, Achyut Dev, Kapil Asundi, Anand |
Keywords: | DRNTU::Engineering::Mechanical engineering Scanning Electron Microscopy (SEM) Wire Grid Polarizers (WGP) |
Issue Date: | 2016 | Source: | Adhikari, A., Dev, K., & Asundi, A. (2016). Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter. Interferometry XVIII, 9960, 99600F-. doi:10.1117/12.2240639 | Conference: | Interferometry XVIII | Abstract: | Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller Matrix of the WGP using a Mueller Matrix Polarimeter. Next the Finite Difference Time Domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures. | URI: | https://hdl.handle.net/10356/90175 http://hdl.handle.net/10220/47214 |
DOI: | 10.1117/12.2240639 | Schools: | School of Mechanical and Aerospace Engineering | Research Centres: | Centre for Optical and Laser Engineering | Rights: | © 2016 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Interferometry XVIII and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2240639]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Conference Papers |
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Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter.pdf | 544.03 kB | Adobe PDF | View/Open |
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