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dc.contributor.authorYang, FaJunen_US
dc.contributor.authorQiao, Yanen_US
dc.contributor.authorGao, KaiZhouen_US
dc.contributor.authorWu, NaiQien_US
dc.contributor.authorZhu, YuTingen_US
dc.contributor.authorSimon, Ian Wareen_US
dc.contributor.authorSu, Rongen_US
dc.identifier.citationYang, F., Qiao, Y., Gao, K., Wu, N., Zhu, Y., Simon, I. W., & Su, R. (2018). Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers. IFAC-PapersOnLine, 51(7), 251-256. doi: 10.1016/j.ifacol.2018.06.309en_US
dc.description.abstractIn wafer manufacturing, with the shrinking down of wafer lot size, cluster tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes, including start-up and close-down processes. In the existing work, optimal scheduling of start-up process for time-constrained single-arm cluster tools has been addressed under the assumption that each processing step consists of just one process chamber. This work relaxes this strict restriction by treating that multiple process chambers could be configured for processing steps. By building Petri net model for the start-up process, a linear program is derived to search a feasible schedule with minimal makespan for time-constrained single-arm cluster tools with parallel chambers for the first time. One industrial example is given to demonstrate the effectiveness of the obtained results.en_US
dc.description.sponsorshipNRF (Natl Research Foundation, S’pore)en_US
dc.format.extent6 p.en
dc.rights© 2018 IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. This is an open-access article distributed under the terms of the Creative Commons Attribution License.en_US
dc.subjectWafer Manufacturingen_US
dc.subjectDRNTU::Engineering::Electrical and electronic engineeringen_US
dc.subjectCluster Toolsen_US
dc.titleScheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambersen_US
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.description.versionPublished versionen_US
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