Please use this identifier to cite or link to this item:
Title: Charging mechanism in a SiO2 matrix embedded with Si nanocrystals
Authors: Fu, Yong Qing
Liu, Yang
Chen, Tupei
Ding, Liang
Zhang, Sam
Fung, Stevenson Hon Yuen
Keywords: DRNTU::Engineering::Electrical and electronic engineering
DRNTU::Engineering::Mechanical engineering
Issue Date: 2006
Source: Liu, Y., Chen, T. P., Ding, L., Zhang, S., Fu, Y. Q., & Fung, S. H. Y., (2006). Charging mechanism in a SiO2 matrix embedded with Si nanocrystals. Journal of Applied Physics, 100, 1-3.
Series/Report no.: Journal of applied physics
Abstract: One of the applications of a Si nanocrystals (nc-Si) embedded in a SiO2 matrix is in the area of nonvolatile memory devices based on the charge storage in the material system. However, whether the charge trapping mainly occurs at the nc-Si/SiO2 interface or in the nc-Si is still unclear. In this work, by x-ray photoemission spectroscopy analysis of the Si 2p peaks, the concentrations of both the nc-Si and the Si suboxides that exist at the nc-Si/SiO2 interface are determined as a function of thermal annealing, and the charging effect is also measured by monitoring the shift of the surface C 1s peak. It is observed that the annealing-caused reduction of the total concentration of the interfacial suboxides is much faster than that of both the C 1s shift and the nc-Si concentration. In addition, the trend of the C 1s shift coincides with that of the nc-Si concentration. The results suggest that the Si nanocrystal, rather than the nc-Si/SiO2 interface, plays the dominant role in the charging effect.
ISSN: 0021-8979
DOI: 10.1063/1.2374929
Rights: Journal of Applied Physics © copyright 2006 American Institute of Physics. The journal's website is located at
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles

Files in This Item:
File Description SizeFormat 
Charging mechanism in a SiO 2 matrix embedded with Si nanocrystals.pdf84.25 kBAdobe PDFThumbnail

Citations 10

Updated on Jul 21, 2020

Citations 10

Updated on Mar 6, 2021

Page view(s) 5

Updated on Jun 26, 2022

Download(s) 10

Updated on Jun 26, 2022

Google ScholarTM




Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.