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dc.contributor.authorYe, J. D.en
dc.contributor.authorDing, Liangen
dc.contributor.authorLiu, Yangen
dc.contributor.authorWong, Jen Iten
dc.contributor.authorFung, Stevenson Hon Yuenen
dc.contributor.authorCen, Zhan Hongen
dc.contributor.authorChen, Tupeien
dc.contributor.authorLiu, Zhenen
dc.contributor.authorYang, Mingen
dc.identifier.citationDing, L., Ye, J. D., Liu, Y., Wong, J. I., Fung, S. H. Y., Cen, Z. H., et al. (2009). Optical transmission and photoluminescence of silicon nitride thin films implanted with Si ions. Electrochemical and Solid State Letters, 12(2), H38-H40.en
dc.description.abstractThe measurements of optical transmission, photoluminescence (PL), and PL excitation (PLE) of Si-implanted silicon nitride thin films annealed at various temperatures have been conducted. A red PL band at ~680 nm is largely enhanced by the Si implantation followed by thermal annealing. The excitation of the red PL band is attributed to the transitions between the Si-bond-related states of sigma and sigma*, while the emission of the red PL band is believed to be from the radiative recombination associated with defect states which are largely increased by the Si ion implantation. Another excitation transition contributing to the red PL band, which is evidenced by the PLE peak at 425 nm, emerges after the annealing at 1100 degree celcius, and it is attributed to the formation of stable Si nanoclusters.en
dc.format.extent3 p.en
dc.relation.ispartofseriesElectrochemical and solid state lettersen
dc.rightsElectrochemical and Solid State Letters © copyright 2009 Electrochemical Society. This journal's website is located at
dc.subjectDRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonicsen
dc.titleOptical transmission and photoluminescence of silicon nitride thin films implanted with Si ionsen
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen
dc.contributor.organizationA*STAR Institute of Microelectronicsen
dc.description.versionPublished versionen
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