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Title: Development of simple user-friendly commercial digital holographic microscope
Authors: Chee, Oi Choo
Singh, Vijay Raj
Sim, Eddy
Anand, Asundi
Keywords: DRNTU::Science::Physics::Optics and light
Issue Date: 2008
Source: Chee, O. C., Singh, V. R., Sim, E., & Anand, A. (2008). Development of a simple user-friendly commercial digital holographic microscope Paper presented at the Practical Holography XXII: Materials and Applications, San Jose, 6912.
Abstract: We report the development of a simple commercial digital holographic microscope. The hologram is recorded using a CCD sensor and numerically reconstructed to provide quantitative analysis of the object. The laser source is coupled via fibre optics and the opto-mechanical setup is flexible and customizable for either the reflection or transmission mode. The user-friendly software allows live reconstruction, simultaneously providing both the amplitude and phase images. System performance is improved with phase unwrapping and interferometric comparison. Additional features include various image enhancements, cross-sectional and line profiling, measurement and data analysis tools for quantitative 3D imaging and surface topography measurement. The performance of the product is tested on different micro devices, glass and silicon surfaces.
DOI: 10.1117/12.760625
Rights: © SPIE. Personal use of this material is permitted. Permission from SPIE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: 10.1117/12.760625.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Conference Papers

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