Superhydrophilic–superhydrophobic template : a simple approach to micro- and nanostructure patterning of TiO2 films

Abstract

Vertically aligned TiO2 nanotube (VATN) array micropatterns were fabricated based on a versatile superhydrophilic–

superhydrophobic template. Scanning electron microscopy, optical microscopy, and an electron probe microanalyzer were systematically

used to confirm the successful fabrication of the dual-scale micro-/nanoscale patterns and characterize their structure

and morphology. The fabrication of the VATN patterning employed a simple photocatalytic lithography technique and mild

reaction conditions at low temperature in the absence of a photoresist and a harmful chemical catalyst. This large-area dual-scale

pattern based on the superhydrophilic–superhydrophobic template is expected to be a promising candidate for many applications

in a broad range of scientific and technological areas, such as sensor arrays and optoelectronic devices.