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Title: Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
Authors: Lau, Gih Keong
Yang, Jiaping
Thubthimthong, Borriboon
Chong, Nyok-Boon
Tan, Cheng Peng
He, Zhimin
Issue Date: 2012
Source: Lau, G. K., Yang, J., Thubthimthong, B., Chong, N.- B., Tan, C. P., & He, Z. (2012). Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite. Applied Physics Letters, 101(3), 033108-.
Series/Report no.: Applied Physics Letters
Abstract: Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a high-CTE polymer composite to solve the shortcoming of silicon. The polymer composite consists of high-aspect-ratio micro-machined SU-8 thermal expander and silicon thermal conductor. A micro-positioner which embodies the proposed polymer composite can drive a slider to travel fast (>1 kHz) more than a 17 nm-pitch data track under a moderate temperature rise (<100 °C).
ISSN: 0003-6951
DOI: 10.1063/1.4737644
Rights: © 2012 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: [doi:]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Journal Articles

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