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dc.contributor.authorWang, Peihongen
dc.contributor.authorDu, Hejunen
dc.contributor.authorShen, Shengnanen
dc.contributor.authorZhang, Mingshengen
dc.contributor.authorLiu, Boen
dc.identifier.citationWang, P., Du, H., Shen, S., Zhang, M., & Liu, B. (2012). Preparation and characterization of ZnO microcantilever for nanoactuation. Nanoscale Research Letters, 7.en
dc.description.abstractZinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron microscopy [FE-SEM], and energy-dispersive X-ray spectroscopy [EDS]. XRD pattern of the ZnO thin film shows that it has a high c-axis-preferring orientation, which is confirmed by a FE-SEM cross-sectional image of the film. The EDS analysis indicates that only Zn and O elements are contained in the ZnO film. The AFM image shows that the film's surface is very smooth and dense, and the surface roughness is 5.899 nm. The microcantilever (Au/Ti/ZnO/Au/Ti/SiO2/Si) based on the ZnO thin film is fabricated by micromachining techniques. The dynamic characterizations of the cantilever using a laser Doppler vibrometer show that the amplitude of the cantilever tip is linear with the driving voltage, and the amplitude of this microcantilever's tip increased from 2.1 to 13.6 nm when the driving voltage increased from 0.05 to 0.3 Vrms. The calculated transverse piezoelectric constant d31 of the ZnO thin film is -3.27 pC/N. This d31 is high compared with other published results. This ZnO thin film will be used in smart slider in hard disk drives to do nanoactuation in the future.en
dc.relation.ispartofseriesNanoscale research lettersen
dc.rights© 2012 The Authors.en
dc.subjectDRNTU::Engineering::Mechanical engineering::Assistive technologyen
dc.titlePreparation and characterization of ZnO microcantilever for nanoactuationen
dc.typeJournal Articleen
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen
dc.description.versionPublished versionen
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