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Title: A practical guide for the fabrication of microfluidic devices using glass and silicon
Authors: Iliescu, Ciprian
Taylor, Hayden
Avram, Marioara
Miao, Jianmin
Franssila, Sami
Keywords: DRNTU::Engineering::Materials::Mechanical strength of materials
Issue Date: 2012
Source: Iliescu, C., Taylor, H., Avram, M., Miao, J., & Franssila, S. (2012). A practical guide for the fabrication of microfluidic devices using glass and silicon. Biomicrofluidics, 6(1).
Series/Report no.: Biomicrofluidics
Abstract: This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow.
ISSN: 1932-1058
DOI: 10.1063/1.3689939
Rights: © 2012 American Institute of Physics. This paper was published in Biomicrofluidics and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: []. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Journal Articles

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