Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/95637| Title: | A practical guide for the fabrication of microfluidic devices using glass and silicon | Authors: | Iliescu, Ciprian Taylor, Hayden Avram, Marioara Miao, Jianmin Franssila, Sami |
Keywords: | DRNTU::Engineering::Materials::Mechanical strength of materials | Issue Date: | 2012 | Source: | Iliescu, C., Taylor, H., Avram, M., Miao, J., & Franssila, S. (2012). A practical guide for the fabrication of microfluidic devices using glass and silicon. Biomicrofluidics, 6(1). | Series/Report no.: | Biomicrofluidics | Abstract: | This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. | URI: | https://hdl.handle.net/10356/95637 http://hdl.handle.net/10220/8955 |
ISSN: | 1932-1058 | DOI: | 10.1063/1.3689939 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | © 2012 American Institute of Physics. This paper was published in Biomicrofluidics and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.3689939]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Journal Articles |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 3. A practical guide for the fabrication of microfluidic devices using glass and silicon.pdf | 710.37 kB | Adobe PDF |  View/Open |
SCOPUSTM
Citations
1
309
Updated on May 5, 2025
Web of ScienceTM
Citations
1
235
Updated on Oct 31, 2023
Page view(s) 20
720
Updated on May 5, 2025
Download(s) 5
809
Updated on May 5, 2025
Google ScholarTM
Check
Altmetric
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.