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Title: Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS
Authors: Tian, Yang
Lee, Kokyan
Wang, Hong
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
Issue Date: 2014
Source: Tian, Y., Lee, K., & Wang, H. (2014). Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS. Microwave and Optical Technology Letters, 56(6), 1462-1465.
Series/Report no.: Microwave and optical technology letters
Abstract: We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications.
ISSN: 0895-2477
DOI: 10.1002/mop.28326
Rights: © 2014 Wiley Periodicals, Inc.
Fulltext Permission: none
Fulltext Availability: No Fulltext
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