Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/97581
Title: Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
Authors: Qiu, Haodong
Wang, Hong
Ke, Feixiang
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2012
Source: Qiu, H., Wang, H., & Ke, F. (2012). Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force. 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems(EuroSimE).
Abstract: In nowadays, ohmic-contact MEMS switches have been widely studied due to their variously advantages, such as high isolation, low insertion loss, negligible power consumption and so on. The micro-contact behavior has been analyzed by several researchers using the conventional asperity deformation model, in which the electrical contact resistance decreases gradually with increasing contact force and finally reaches a saturation region. This paper presents a study of the instable region of micro-contact behaviors under low contact force and low current conditions, where the conventional model does not seems to be applicable. Random telegraph signals (RTS) were captured during the transition period before the establishment of stable electrical contact. An electrothermal approach was applied in our work and the time constants of the RTS during instable region are extracted statistically from the experimental data. The fundamental mechanism for the contact resistance instabilities were discussed under the framework of material transfer enhanced by localized Joule heating.
URI: https://hdl.handle.net/10356/97581
http://hdl.handle.net/10220/11820
DOI: 10.1109/ESimE.2012.6191804
Rights: © 2012 IEEE.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:EEE Conference Papers

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