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dc.contributor.authorHeidari, Amiren
dc.contributor.authorYoon, Yong-Jinen
dc.contributor.authorPark, Mi Kyoungen
dc.contributor.authorPark, Woo-Taeen
dc.contributor.authorTsai, Julius Ming-Linen
dc.identifier.citationHeidari, A., Yoon, Y.-J., Park, M. K., Park, W.-T., & Tsai, J. M.-L. (2012). High sensitive dielectric filled Lamé mode mass sensor. Sensors and Actuators A: Physical, 188, 82-88.en
dc.description.abstractA new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.en
dc.relation.ispartofseriesSensors and actuators A: physicalen
dc.rights© 2012 Elsevier B.V.en
dc.subjectDRNTU::Engineering::Mechanical engineeringen
dc.titleHigh sensitive dielectric filled Lamé mode mass sensoren
dc.typeJournal Articleen
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen
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