Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/97645
Title: | High sensitive dielectric filled Lamé mode mass sensor | Authors: | Heidari, Amir Yoon, Yong-Jin Park, Mi Kyoung Park, Woo-Tae Tsai, Julius Ming-Lin |
Keywords: | DRNTU::Engineering::Mechanical engineering | Issue Date: | 2012 | Source: | Heidari, A., Yoon, Y.-J., Park, M. K., Park, W.-T., & Tsai, J. M.-L. (2012). High sensitive dielectric filled Lamé mode mass sensor. Sensors and Actuators A: Physical, 188, 82-88. | Series/Report no.: | Sensors and actuators A: physical | Abstract: | A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications. | URI: | https://hdl.handle.net/10356/97645 http://hdl.handle.net/10220/12124 |
ISSN: | 0924-4247 | DOI: | 10.1016/j.sna.2012.03.040 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | © 2012 Elsevier B.V. | Fulltext Permission: | none | Fulltext Availability: | No Fulltext |
Appears in Collections: | MAE Journal Articles |
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