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Title: High sensitive dielectric filled Lamé mode mass sensor
Authors: Heidari, Amir
Yoon, Yong-Jin
Park, Mi Kyoung
Park, Woo-Tae
Tsai, Julius Ming-Lin
Keywords: DRNTU::Engineering::Mechanical engineering
Issue Date: 2012
Source: Heidari, A., Yoon, Y.-J., Park, M. K., Park, W.-T., & Tsai, J. M.-L. (2012). High sensitive dielectric filled Lamé mode mass sensor. Sensors and Actuators A: Physical, 188, 82-88.
Series/Report no.: Sensors and actuators A: physical
Abstract: A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.
ISSN: 0924-4247
DOI: 10.1016/j.sna.2012.03.040
Rights: © 2012 Elsevier B.V.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Journal Articles

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