Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/97976
Title: The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications
Authors: Tjahjana, Liliana
Zhang, Dao Hua
Tobing, Landobasa Yosef Mario A. L.
Issue Date: 2012
Source: Tobing, L. Y. M. A. L., Tjahjana, L., & Zhang, D. H. (2012). The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications. 2012 Photonics Global Conference (PGC).
Abstract: We present a systematic study of different sonicated cold development scenarios for the purpose of achieving high density optical metamaterial. High aspect ratio sub-15-nm dots at pitch as small as 40 nm are successfully demonstrated for 110-nm thick resist at low exposure dose. Some of the key results include sub-15-nm gold nanodots at 40-nm pitch and high density optical metamaterial (with only ~30nm separation between two adjacent resonators).
URI: https://hdl.handle.net/10356/97976
http://hdl.handle.net/10220/12195
DOI: 10.1109/PGC.2012.6458017
Rights: © 2012 IEEE.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:EEE Conference Papers

Page view(s) 50

319
Updated on Mar 6, 2021

Google ScholarTM

Check

Altmetric


Plumx

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.