Piezoelctric d33 mode diaphragm energy harvester for self-powered sensor application

Abstract

This work presents the design, fabrication, and characterization of an energy harvester using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm containing the spiral electrode operates in d33 mode, which is different from the commonly used d31 mode diaphragm. The polarization in the diaphragm has a complex distribution that follows to the poling field induced by the double spiral electrode. The matching load impedance and the optimized working frequency were characterized.