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Title: The influence of titanium nitride barrier layer on the properties of CNT bundles
Authors: Yap, Chin Chong
Tan, Dunlin
Brun, Christophe
Li, Hong
Teo, Edwin Hang Tong
Dominique, Baillargeat
Tay, Beng Kang
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2013
Source: Yap, C. C., Tan, D., Brun, C., Li, H., Teo, E. H. T., Dominique, B., et al. (2013). The influence of titanium nitride barrier layer on the properties of CNT bundles. 2013 IEEE 5th International Nanoelectronics Conference (INEC), 4-6.
Abstract: The use of carbon nanotubes (CNTs) for electrical interconnections is hinder by the possibility of growing CNT directly onto metallization. The introduction of barrier layer between catalyst and metallization is thus essential to permit the direct growth of vertically aligned CNT bundles using CVD approaches. As a result, the resultant CNT bundle resistivity is not only a function of the densities and quality of CNT growth, but is also affected by the thickness and resistivity of the barrier layer. CNT is growth on different thickness of TiN with 2 different underlying layers (Au and SiO2). It was observed that the length of CNT grown on Au is independent of TiN thickness, whereas the height decreases for Au underlayers case. In both scenarios, both have well aligned CNTs growth when the thickness of TiN is <; 90nm.
DOI: 10.1109/INEC.2013.6465937
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:EEE Conference Papers

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