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Title: Fabrication and plasma resistance properties of transparent YAG ceramics
Authors: Qin, Xianpeng
Zhou, Guohong
Yang, Hao
Wong, Jen It
Zhang, Jian
Luo, Dewei
Wang, Shiwei
Ma, Jan
Tang, Dingyuan
Issue Date: 2011
Source: Qin, X., Zhou, G., Yang, H., Wong, J. I., Zhang, J., Luo, D., Wang, S., Ma, J.,& Tang, D. (2012). Fabrication and plasma resistance properties of transparent YAG ceramics. Ceramics International, 38(3), 2529-2535.
Series/Report no.: Ceramics International
Abstract: High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.
ISSN: 0272-8842
DOI: 10.1016/j.ceramint.2011.11.023
Fulltext Permission: none
Fulltext Availability: No Fulltext
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