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dc.contributor.authorQin, Xianpengen
dc.contributor.authorZhou, Guohongen
dc.contributor.authorYang, Haoen
dc.contributor.authorWong, Jen Iten
dc.contributor.authorZhang, Jianen
dc.contributor.authorLuo, Deweien
dc.contributor.authorWang, Shiweien
dc.contributor.authorMa, Janen
dc.contributor.authorTang, Dingyuanen
dc.identifier.citationQin, X., Zhou, G., Yang, H., Wong, J. I., Zhang, J., Luo, D., Wang, S., Ma, J.,& Tang, D. (2012). Fabrication and plasma resistance properties of transparent YAG ceramics. Ceramics International, 38(3), 2529-2535.en
dc.description.abstractHigh quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.en
dc.relation.ispartofseriesCeramics Internationalen
dc.titleFabrication and plasma resistance properties of transparent YAG ceramicsen
dc.typeJournal Articleen
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen
dc.contributor.schoolSchool of Materials Science and Engineeringen
dc.contributor.researchTemasek Laboratoriesen
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