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    • Design optimization for an SOI MOEMS accelerometer 

      Teo, Adrian J. T.; Li, Holden King-Ho; Tan, Say Hwa; Yoon, Yong-Jin (2017)
      With optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electro-mechanical systems accelerometer is discussed in this paper. This process has enabled a simplistic design that employs ...