Now showing items 1-2 of 2

    • Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy 

      Yoo, Woo Sik; Kang, Kitaek; Ueda, Takeshi; Ishigaki, Toshikazu; Nishigaki, Hiroshi; Hasuike, Noriyuki; Harima, Hiroshi; Yoshimoto, Masahiro; Tan, Chuan Seng (2014)
      To meet various physical property requirements of materials for advanced applications for specific devices, combinations of Si/Ge, Ge/Si, Si1-xGex/Si, are frequently introduced in the device fabrication process. Epitaxy, ...
    • Detection of Ge and Si intermixing in Ge/Si using multiwavelength micro-raman spectroscopy 

      Yoo, Woo Sik; Kang, Kitaek; Ueda, Takeshi; Ishigaki, Toshikazu; Nishigaki, Hiroshi; Hasuike, Noriyuki; Harima, Hiroshi; Yoshimoto, Masahiro; Tan, Chuan Seng (2014)
      To meet various physical property requirements of materials for advanced application, for specific devices, combinations of Si/Ge, Ge/Si, Si1-xGex/Si, are frequently introduced in the device fabrication process. Epitaxy, ...