Now showing items 1-2 of 2
Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers
In wafer manufacturing, with the shrinking down of wafer lot size, cluster tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes, including start-up and ...
Efficient Approach to Cyclic Scheduling of Single-arm Cluster Tools with Chamber Cleaning Operations and Wafer Residency Time Constraint
In semiconductor manufacturing, with the shrinking down of wafer circuit widths, a strict quality control is required for wafer fabrication processes, resulting in that after a wafer being processed and removed from a ...