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Effects of Si(001) surface amorphization on ErSi2 thin film

Tan, Eu Jin; Kon, M. L.; Pey, Kin Leong; Lee, Pooi See; Zhang, Y. W.; Wang, W. D.; Chi, Dong Zhi (2005)

In a materials study of ErSi2/Si(001) as a potential candidate for Schottky source/drain NMOS application, the properties of ErSi2 thin film were investigated with varying degrees of Si(001) surface amorphization. The ...