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      Chen, Zhe (1)
      Chen, Zhong (1)
      Gan, Zhenghao (1)
      Mhaisalkar, Subodh Gautam (1)
      Prasad, K. (1)
      Zhang, Sam (1)
      Date
      2004 (1)
      Subject
      Engineering (1)
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      Study of interfacial adhesion energy of multilayered ULSI thin film structures using four-point bending test 

      Gan, Zhenghao; Mhaisalkar, Subodh Gautam; Chen, Zhong; Zhang, Sam; Chen, Zhe; Prasad, K. (2004)
      Adhesion between barrier layers and interconnect metals or dielectrics continues to be a significant concern in the microelectronic industry, with delamination occurring in between the layers leading to device failure. As ...

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