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White light single-shot interferometry with colour CCD camera for optical inspection of microsystems
White light interferometry is a well-established optical tool for surface metrology of reflective samples. In this work, we discuss a single-shot white light interferometer based on single-chip color CCD camera and Hilbert ...
White light interferometer with color CCD for 3D-surface profiling of microsystems
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated ...