Now showing items 1-3 of 3
White light single-shot interferometry with colour CCD camera for optical inspection of microsystems
White light interferometry is a well-established optical tool for surface metrology of reflective samples. In this work, we discuss a single-shot white light interferometer based on single-chip color CCD camera and Hilbert ...
Two-wavelength microscopic speckle interferometry using colour CCD camera
Single wavelength microscopic speckle interferometry is widely used for deformation, shape and non-destructive testing (NDT) of engineering structures. However the single wavelength configuration fails to quantify the large ...
White light interferometer with color CCD for 3D-surface profiling of microsystems
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated ...