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Digital holography for MEMS application
Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
Compact handheld digital holographic microscopy system development
Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized ...